Fraunhofer Institute for Applied Optics and Precision Engineering IOF
Motivation
With the help of the “OptiMon” online spectrometer newly developed at Fraunhofer IOF, the transmission spectrum of a growing layer is continuously recorded. On the basis of the measured transmission spectra, software calculates the actually achieved construction parameters of the layer systems and continuously compares these with the target values.
Procedure
To investigate the optical properties, spectral photometry (measurement of directional and diffuse transmission and reflection) is used; a microscope photometer is available for spatial resolution investigations.
Parameters of detectors for transmissive measurement (OptiMon) and plasma emission measurement (PlasmaMonitor)
| OptiMon | PlasmaMonitor | |
|---|---|---|
| spectral range | 360 - 920 nm | 200 - 850 nm |
| slit | 140 µm | 50 µm |
| optical resolution | ca. 5 nm | ca. 2 nm |
| typical integration time | 4 ms | 4 ms |