further scientific literature
- S. Schröder, T. Herffurth, H. Blaschke, A. Duparré, "Angle-resolved scattering: an effective method for characterizing thin-film coatings," Appl. Opt. 50, C164-C171 (2011)
- S. Schröder, A. Duparré, L. Coriand, A. Tünnermann, D. H. Penalver, J. E. Harvey, "Modeling of light scattering in different regimes of surface roughness," Opt. Express 19, 9820-9835 (2011)
- Trost, Marcus; Schroeder, Sven; Duparre, Angela; et al. ,Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources, Optics Express 21, 27852-27864 (2013)
- Schröder S., Unglaub D., Trost M., Cheng X., Zhang J., Duparré A. "Spectral angle resolved scattering of thin film coatings," Appl. Opt. 53, A35-A41 (2014)
- Schröder S. , Trost M., Herffurth T., von Finck A., and Duparré A. "Light scattering of interference coatings from the IR to the EUV spectral regions" Adv. Opt. Techn. 3, 113-120 (2014)
- von Finck, A., Herffurth, T., Schröder, S., Duparré, A., and Sinzinger, S. "Characterization of optical coatings using a multisource table-top scatterometer" Appl. Opt. 53, A259-A269 (2014)
- Trost, M., Herffurth, T., Schmitz, D., Schröder, S., Duparré, A., and Tünnermann, A. "Evaluation of subsurface damage by light scattering techniques" Appl. Opt. 52, 6579-6588 (2013)
- Herffurth, T., Schröder, S., Trost, M., Duparré, A., and Tünnermann, A. "Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor" Appl. Opt. 52, 3279-3287 (2013)
- Harvey J. E., Schröder S., Choi N., and Duparré A., "Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles", Opt. Eng. 51, 013402 (2012)
Fraunhofer Institute for Applied Optics and Precision Engineering IOF