Research Reports: Metal optics

Recent metal optics developments at Fraunhofer IOF

Fraunhofer IOF offers the development and manufacturing of optical components and systems based on metal materials. In addition, our scientists conduct research on the continuous further development and optimization of metallic precision components and systems. These are used, for example, in space, terrestrial astronomy, as well as in industry, semiconductor manufacturing, and laser processing.

 

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Precision optical components and systems

 

Below you will find research reports on our recent metal optics developments:

Additively manufactured metallic mirrors.
© Fraunhofer IOF
At Fraunhofer IOF, metallic precision optics are manufactured for a wide range of applications. In addition to symmetrical components, free-form metal optics are also realized.

Optical components for the EnMAP hyperspectral imager

Lightweight mirror for earth observation.
© Fraunhofer IOF
Lightweight mirror for earth observation.

 

EnMAP (Environmental Mapping and Analysis Program) is a German hyperspectral satellite mission to earth observation, which has been initiated and funded by the German Aerospace Center (DLR). The mission start is scheduled for 2019. The optical system consists of a telescope (Three Mirror Anastigmat / TMA) and two independent spectrometers for the visible (VNIR) and the short-wave (SWIR) infrared spectral range.

The mirrors for telescope as well as spectrometer have been designed and produced in close collaboration with and to the specifications of OHB at Fraunhofer IOF. The established alloy aluminum 6061T6 was used as base material. A polishable amorphous nickel-phosphorus (NiP) layer with a phosphorous content between 10 % and 12 % was applied to the ultra-precise, diamond-finished mirrors. The subsequent shape correction by means of diamond turning ensures shape accuracies of better that 500 nm p.-v. (peak-to-valley) with a surface roughness of 5 nm rms (root-mean-square). By a subsequent polishing step, roughness values of 0.5 nm rms were obtained using White Light Interferometry (WLI) by 50-fold magnification. In a final step, the shape has been corrected by Ion Beam Finishing (IBF). For the aspheric mirrors, the shape was measured by Computer Generated Holograms (CGH) realized by electron beam lithography at Fraunhofer IOF. As a result, shape accuracies of better than 140 nm p.-v. and 18 nm rms, respectively, with a very low surface roughness (< 0.8 nm rms) have been achieved after typically two to three correction cycles by IBF. With this approach, the requirements for the  optical properties (high surface shape accuracy, low surface roughness, and high reflection), the mechanical properties (high stiffness, low mass), and the thermal properties (application temperature and storage/transport) have been fulfilled. In order to obtain maximum reflection over the entire spectral range used, the mirrors were coated with protected silver layers (spectral range from 420 nm to 2450 nm) and with gold layers (spectral range from 900 nm to 2450 nm), respectively. In addition to the production of the mirrors, the coating of the prisms used in the spectrometers has been carried out at Fraunhofer IOF, too.

Four different coatings were optimized and qualified for use in space. These were three broadband antireflection coatings for the prisms made of Homosil/SF6 (spectral range from 420 nm to 1000 nm each) and Infrasil (spectral range from 900 nm to 2450 nm) as well as a silver-based highly reflective layer, which has been used as a back reflector on the SF6 prisms.

 

Acknowledgment
We would like to thank OHB and DLR. The work was funded as part of the project EnMAP, FKZ: 50 EP 0801.

 

Lightweight mirror.
© Fraunhofer IOF
Fig. 1: Lightweight mirror (Mirror type M1) manufactured at Fraunhofer IOF.
Shape deviation / interferogram and micro-roughness / WLI.
© Fraunhofer IOF
Fig. 2: Shape deviation / interferogram and micro-roughness / WLI.

 

Authors: Mark Schürmann, Dieter Gäbler, Stefan Schwinde, Sandra Müller, Matthias Beier, Stefan Risse, Hermann Bittner (OHB System AG), Markus Erhard (OHB System AG)

Ultraprecise metal scan mirrors for ultrashort pulse lasers

Two ultralightweight metal mirrors with dielectrically enhanced metal coating for fast galvoscanners.
© Fraunhofer IOF
Ultralightweight metal mirrors with dielectrically enhanced metal coating for fast galvoscanners.

 

Scanning mirrors for ultrashort pulse-applications must have small mechanical inertia and a small mirror mass to allow very fast and precise positioning of the pulses. Due to the high acceleration, there are stringent demands on the stiffness of the mirrors. Moreover a high quality optical surface is required. Ultraprecise metal mirrors are an attractive solution that fulfils these requirements. In addition, the easy and cost-effective manufacturing technology is an important advantage in comparison to alternatives such as glass-, glass-ceramics-, and ceramic-mirrors.

At Fraunhofer IOF scan mirrors were manufactured from AlSi-composite material. Ultraprecise AlSi based lightweight mirrors with high surface quality can be manufactured by applying electroless deposited nickel (NiP) platings in combination with diamond turning and polishing. A surface roughness lower than 1 nm rms was achieved after polishing. The amorphous NiP and the AlSi alloy are thermally matched better than 0.5 ppm.

In order to achieve high reflectivity values in combination with a high laser damage threshold (LIDT) suitable for scan mirrors, the high reflectivity of metal-layers was enhanced by dielectric HfO2/SiO2 stacks. These coatings are considerably thinner than all dielectric high-reflective coatings and have sufficiently high damage thresholds above 1 /cm2@8ps. The damage measurements were performed at a wavelength of 1030 nm.

 

Metal mirrors with metal-dielectric HR-coating.
© Fraunhofer IOF
Fig. 1: Metal mirrors with metal-dielectric HR-coating for ultrashort laser pulses applied in scanner applications.
Chart with measurement of laser induced damage treshold.
© Fraunhofer IOF
Fig. 2: Measurement of laser induced damage treshold (425 fs pulses; S-on-1 mode) with scattered light for online-detection of damage.

 

Authors: Mark Schürmann, Stefan Risse, Helena Krämer, Sandra Müller, Ralph Schlegel

Advanced manufacturing technology for optics assembly

Adjustment milling of a beamsplitter cube assembly.
© Fraunhofer IOF
Adjustment milling of a beamsplitter cube assembly.

 

Efficient assembly technologies are a key factor in improving the profitability and quality of optical systems. The added value of high quality optics is crucially dependent on their system integration. Rising complexity (sphere, asphere, freeform) increases the degrees of freedom that must be considered during metrology and for the positioning of each optical element in the system. Well defined references for optics are one of the central aspects of work in the precision engineering components and systems business field. Numerous activities based on the alignment turning of spheres and aspheres are topics of research. A similar approach for non-rotationally-symmetric optics was investigated on a joint project. The objective of the project was to manufacture references using milling as a manufacturing method. The main result of the project was the development of two basic machine concepts and their experimental proof of concept. The “Discrete Technology” notion separates the manufacturing of the reference elements from a component-specific metrology setup by using a datum point clamping system. Corrective machining of the reference elements is realized based on the measurement data which are strongly related to the optical function of the part. The novel approach can be used flexibly for optical elements including freeform optics. The concept was demonstrated using selected demonstrator samples. Based on ultraprecise manufactured mounting references, the reproducible assembly of a beamsplitter cube could be demonstrated with position tolerances under 2 microns and angle tolerances of below 20 arcsec.

Based on a combination of an alignment turning machine with a CNC-milling module, a new machining setup to manufacture rotationally symmetric and non-rotationally-symmetric housing structures was realized. The outcome of this is a variety of relevant applications such as cylindrical lenses, toroids, aspherical cylinders and aspheres. New methods for the measurement of decentration as well as specific adjustment algorithms have been developed, particularly with regard to cylindrical lenses.


Acknowledgements

The authors would like to thank the Forschungsvereinigung Feinmechanik, Optik und Medizintechnik e.V. (F.O.M.) and the participating companies for their support on the AiF program entitled “Industrial Collective Research for SME”, IGF-project 16909 BR / 1.

Corrective machining approach for reference elements.
© Fraunhofer IOF
Fig. 1: Corrective machining approach for reference elements.

 

Authors: Andreas Gebhardt, Matthias Beier, Erik Schmidt, Stefan Nolte

More scientific publications

 

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