laboratory equipment, measurement systems |
typ / producer |
specifications (measuring range/resolution/accuracy) |
scattered light measurement |
||
angle resolved scattered light measurement "Albatross" |
self-made |
loss mechanisms, nanostructures, particles, defects ( UV - VIS – IR) (157 nm - 1064 nm) |
angle resolved scattered light measurement - "Vulstar" |
self-made |
loss mechanisms, nanostructures, particles, defects (VUV: 157, 193 nm) |
total scattered light measurement |
self-made |
loss mechanisms, nanostructures, particles, defects (157 nm - 10,6 µm) |
scattered light - and reflexions measurement system at 13 nm - "Merlin" |
self-made |
loss mechanisms, nanostructures |
scattered light based roughness sensor "horos" |
self-made |
loss mechanisms, nanostructures, particles, defects |
table-top scattered light measurement system "Albatross TT" |
self-made |
loss mechanisms, nanostructures, particles, defects |
spectral photometer (120 nm - 50 µm) |
||
scanning force microscopy (AFM) |
||
AFM 1 |
VEECO D3100 (2002) |
nanostructures |
AFM 2 |
VEECO D3000 (1996) |
nanostructures |
large range AFM |
SIS Nanostation 300 |
nanostructures |
scanning electron microscopy |
Philips |
|
laser scanning microscope |
||
white light interferometry (WLI) |
||
WLI 1 |
self-made |
nano and micro structures < 2 nm RMS (measuring range up to 100 µm), < 25 nm RMS (measuring range up to 500 µm), |
WLI 2 |
Zygo NewView 7300 |
nano and micro structures (< 1 nm vertical resolution, measuring fields 50 x 50 µm bis 5 x 5 mm, Stiching up to several square millimeter, automated processes) |
WLI 3 |
Zygo New 6000 |
nano and micro structures (< 1 nm RMS, inclination adjustment using a swiveling measurement head) |
confocal microscopy |
Zeiss LSM 510 |
nano and micro structures |
nomarski microscopy (DIC) |
Leica |
nano structures, defects |
laser-ratiometric T,R - measurement in VUV (157 nm, 193 nm) |
self-made |
|
X-ray diffractometry (XRD), -reflectometry |
||
Bruker D8 |
coating thickness, roughness, density, crystal structur (wavelength 0.154 nm) |
|
Bruker D5005 |
coating thickness, roughness, density, crystal structur (wavelength 0.154 nm) |
|
microscopy photometry |
Zeiss |
T/R-measuring (UV/VIS) |
spectroscopic ellipsometry |
||
mechanical profilometry (Talysurf 6c, Talysurf PGI+) |
TaylorHobson |
surface: shape and roughness (measuring range 120 x 100 mm, calibration at 100 nm) |
measurement techniques for testing of long-term stability and adhesion |
||
microscope with image processing |
Olympus |
nano structures, defects (microscope BX 51 (DIC)) |
microscope with image processing |
Olympus |
nano structures, defects (stereo microscope SZX 9) |
FTIR-spectrometer |
Varian |
polymer surfaces, coatings ATR, IRRAS included |
contact angle measuring station (static) |
self-made |
|
contact angle measuring station, dynamic) |
Dataphysics DCA 20 |
liquid contact angle |
auto-focus system |
UBM |
|
VUV-Spectrometer |
LZH |
120–230 nm, Ts,Tp,Rs,Rp with 0 - 80° |
UV/VIS/NIR-spectrometer |
PE Lambda 19 |
180–3000 nm, 6° and 45° |
UV/VIS/NIR-spectrometer |
PE Lambda 900 |
170–3000 nm, 6° and 45° |
UV/VIS-spectrometer |
PE Lambda 850 |
170–900 nm |
Faber spectrometer |
Zeiss MCS 400 |
200–1000 nm, up to 500°C |
OptiMon |
Eigenbau |
400–920 nm, 4 ms measuring duration |
UV-microscope |
Leica |
|
spectral auto-focus microscope + software MarkIII |
Miroprof/ Jurca, FRT |
100 mm x 100 mm (scanning), zmax 300 µm , dz10 nm, coating 25–200 µm |
surface thickness measuring system/ spectral reflection |
FTP advanced/ Sentech |
50 nm...30 µm, time-independent, library n,k (400...900 nm) |